- High speed conveyance system
- High speed conveyance for Thin-substrates.
Soft handling for a substrate which is thin and breaks easily.
- Multi-sequence conveyance system
- Automatic Multi-sequence conveyance.
Multi-sequence conveyance for space saving.
- R to R thin-film loading system
- For a thin film application.
A proper tension is adjusted automatically and a film is conveyed.
An Edge controller, an anti-wrinkle mechanism, protection film removing function, various options are available.
- Sheet by sheet loading system
- Sheet by sheet, loading and unloading system.
Available for various application, such as Wafers, Green sheets, and Films. It can respond flexibly by a customer's demand.
- High speed sorting system
- The target distinguished by the inspection unit is automatic [high-speed]-classified.
By customer request, an amorous glance, quality, etc. can be sorted on a multi-stage story.(Ex:48 steps sorting)
- Auto separator system
- Smooth removing system.
It removes protection film without affecting a base substrate. It prevents unevenness by man-operation.
- Grinder system
- After supplying a substrate automatically, and grinding the surface with a polishing, it conveys to a drying furnace.
It can respond to a small or large-sized substrate.
- AOI system
- It inspects and carries out sorting of the substrate before processing or after processing.
The inspection of various kinds, such as glass and a film, can be performed.